TANNER MEMS DESIGN FLOW

Tanner MEMS Design Flow

  • Create a MEMS 3D model from layout
  • Highly programmable layout editor with MEMS-friendly capabilities, such as curved polygons
  • Design rule checking for MEMS manufacturability
  • System-level simulation of IC design and MEMS devices
  • Complete layer & design geometry visualization
  • Automatically generate behavioral models of your MEMS devices
  • Import DXF with boundary reconstruction, export DXF

Features
  • Advanced 3D analysis tools



  • Complex polygon Boolean operations



  • Automatic layout generation with parameterized cells



  • Advanced mask layout and verification flow